- Corporate/
Group profiles - Highlights &
Exhibit products - Products
Details - Download information
- New Technology Presentation
- WebExpo
- SNS

■Business details
We design and manufacture batch horizontal and vertical diffusion, PECVD and LPCVD furnaces for semiconductor industries or related R&D institutes. Other products include gas source systems like gas cabinets and valve manifold boxes. The heart of all SVCS tools is in-house designed control system.
■Highlights & Exhibit products
We present on-going CZECH-JAPAN joint development project: ALD Reactor in Minimal Fab Standard. The exhibition is in cooperation with project pertmers:
- National Institute of Advanced Industrial Science and Technology (AIST)
- HORIBA STEC
- YOKOGAWA Solition Service
Table top batch furnace for R&D, production size horizontal and vertical furnaces, ultra high purity gas and liquid delivery systems like gas cabinets are presented as well.